In our continuing effort to enhance the value of the workshop experience there will be a tutorial on Monday afternoon and one on Tuesday afternoon.
Monday Tutorial in Angora Room:
The Analysis of Oxide Reliability
Data Techniques for measuring gate oxide reliability, such
as TDDB, voltage ramps, and current ramps have existed for
a long time, but many of these are applied qualitatively.
We discuss here detailed aspects of analysis methods which can
be applied to these techniques to make absolute reliability
determinations. Along the way, we discuss important aspects
such as failure rate based methodologies, band-bending
corrections to measured gate voltages, active gate oxide area scaling,
and quasi-static lifetime transformations.
William Hunter of Texas Instruments, Dallas, TX