Semiconductor Equipment Industry: Migration From Equipment to Entire Process Module Solutions
OUTLINE
Microchip Manufacturing Climate
PPT Slide
Response of Electronic Industry
Horizontalization of the Computer Industry
Vertical IDM to Horizontal Networked Model
Metamorphism of Foundry & Equipment Industries
Cu/Low k Interconnect Technology Development
Cu / Low k Technology Challenges
Key Technology Challenges Dielectrics
Key Technology Challenges Dielectric Etch
Key Technology Challenges Metals
Key Technology Challenges Cu CMP
Key Technology Challenges Defect Detection & Analysis
Dual Damascene Process Flow & Equipment Set
AMAT Cu/SiO2: EM Performance
Summary
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