WEDNESDAY, October 14, 10:30 a.m. - 12:10 p.m
Session #3: Contributors to Failure (CTF)
John Suehle, NIST & Prasad Chaparala, National Semiconductor, Co-chairs
CTF-1 "Electric Field and Temperature Acceleration of Quasi-Breakdown
Phenomena in Ultrathin Oxides," D. Roy, S. Bruyere and E. Vincent of
ST Microelectronics, Crolles, France; G. Ghibaudo of
LPSC/ENSERG, Grenoble, France
CTF-2 "A Comprehensive Physical Model of Oxide Wearout and
Breakdown Involving Trap Generation, Charging and Discharging," D. Qian and
D.J. Dumin of Clemson University, Clemson, SC
CTF-3 "A Preliminary Investigation of the Kinetics of Post-Oxidation
Anneal Induced E'-Precursor Formation," J.F. Conley, Jr. and W.F. McArthur
of Dynamics Research Corp., Beaverton, OR and P.M. Lenahan of
Pennsylvania State University, University Park, PA
CTF-4 "A New Mechanism for Gate Oxide Degradation," Chuan H. Liu of
United Microelectronics Corp., Hsin-Chu, Taiwan, R.O.C.; Thomas A.
DeMassa of Arizona State University, Tempe, AZ; and Julian J. Sanchez of
Intel Corp., Chandler, AZ