J.-L. SANCHEZ, "MEMS-Based Magnetic Coils Exceed The Limitations Of Optical Couplers", Cellule Intégration, L'intégration au LAAS, 2001.
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Titre : J.-L. SANCHEZ, MEMS-Based Magnetic Coils Exceed The Limitations Of Optical Couplers, Cellule Intégration, L'intégration au LAAS, 2001.

Auteur : J-L Sanchez (CIP)

Vers : Cellule Intégration - L'intégration au LAAS
Vers : MEMS-Based Magnetic Coils Exceed The Limitations Of Optical Couplers
Vers : Process for manufacture of micro electromechanical devices having high electrical isolation
Vers : Bibliographie
Lien : private/MEMS01.pdf - 49 pages, 2053 Ko.

MEMS-Based Magnetic Coils Exceed The Limitations Of Optical Couplers


Source : Electronic Design - July 24, 2000 - MEMS-Based Magnetic Coils Exceed The Limitations Of Optical Couplers
Implementing surface-micromachined-based magnetic coils in a standard semiconductor process, Analog Devices is readying a
new class of ICs for industrial automation, motor control, and data acquisition. MEMS, acting as a post-processed
superstructure, has been added to the silicon die to produce the ADuM1100 digital isolator.
This device is designed to provide accurate and fast data-transfer rates in noisy industrial environments. Compared to
conventional optical data-transmission methods that employ optocouplers, the isolator substantially improves power
consumption and lowers cost. It also uses the magnetic-based approach to digital isolation--or µmIsolation, as ADI calls it--to
overcome the inefficiencies associated with electro-optical devices.
The ADuM1100 can support data rates as high as 100 Mbits/s. ADI's business development manager, Ronn Kliger, says that the
magnetic coupling technique provides the same level of isolation as optocouplers. Yet it also comes with a threefold
improvement in power consumption, propagation delay, pulse-width distortion, and transient immunity.
This isolator comprises a driver that's magnetically coupled to a receiver, which in turn uses a MEMS-based transformer
consisting of high-Q micromachined primary and secondary coils. "With 100 nH in inductance, the spiral coils are tightly
coupled to achieve high mutual coupling," says Geoff Haigh, senior staff scientist at ADI. "In essence, the design uses two
MEMS-based transformers, separated by an insulating layer, to generate a differential signal for the receiver chip."
Other salient features include 2.5-kV (rms) input-output isolation and 25-kV transient immunity. It has less than 2 ns of pulse-width
distortion, and it consumes 30 mW of power at 25 Mbits/s. Designed for 3.3- and 5.0-V operation, the device is pin-compatible
with some existing optocouplers.
Two grades are available. The ADuM1100A delivers a 25-Mbit/s data rate, while the ADuM1100B offers a 100-Mbit/s rate.
Both come in 8-lead SOICs. Sampling now, production is slated for this fall. Model A costs $2.50 and model B is $3.50, both in
10,000-unit quantities.
Analog Devices Inc., Two Technology Way, Norwood, MA 02062; (781) 461-3732; http://www.analog.com/umic
Auteur : Ashok Bindra

Process for manufacture of micro electromechanical devices having high electrical isolation


Patent Number: EP0955668
Publication date: 1999-11-10
Requested Patent: EP0955668 g f e d c
Application Number: EP19990109110 19990507
Priority Number(s): US19980075008 19980508
IPC Classification: H01L21/00
EC Classification:
Equivalents: JP2000210900 (JP00210900), US6159385 g f e d c g f e d c
Abstract :
The present invention relates to a fabrication process for manufacture of micro electromechanical
(MEM) devices such as cantilever support beams. This fabrication process requires only two
lithographic masking steps and offers moveable electromechanical devices with high electrical
isolation. A preferred embodiment of the process uses electrically insulating glass substrate (102) as
the carrier substrate and single crystal silicon (108) as the MEM component material. The process
further includes deposition of an optional layer of insulating material (110) such as silicon dioxide on top
of a layer of doped silicon (108) grown on a silicon substrate. The silicon dioxide (110) is epoxy bonded
to the glass substrate (102) to create a silicon-silicon dioxide-epoxy-glass structure (200). The silicon is
patterned using anisotropic plasma dry etching techniques. A second patterning then follows to pattern
the silicon dioxide layer (110) and an oxygen plasma etch is performed to undercut the epoxy film (120)
and to release the silicon MEM component. This two-mask process provides single crystal silicon
MEMs with electrically isolated MEM component. Retaining silicon dioxide insulating material (110) in
selected areas mechanically supports the MEM component.
Data supplied from the esp@cenet database - l2

Cellule Intégration - L'intégration au LAAS


Contributeurs :
R. Alami (RIA)
C. Bergaud (TMN)
S. Bonnefont (PHOTO)
M. Briot (RIA)
G. Juanole (OLC)
J-C Hennet (OCSD)
Y Queinnec (MAC)
F. Morancho (CIP)
Ph. Owezarski (OLC)
F. Roubellat (OCSD)
J. Tasselli (MIS)
E. Tournier (CISHT)

1.4.1 Ingénierie des exigences 7
1.4.2 Maîtrise de la dynamique du processus de conception 8

2.1.1 Modélisation et co 10
2.1.2 Technologies. 11
2.1.3 Réalisation de démonstrateurs 12
2.1.4 Caractérisation. 17
2.2.1 Modélisation et co 18
2.2.2 Démonstrateurs 18
2.3.1 Modélisation et co 20
Info : Les travaux relatifs d'une part à l'intégration de la fonction thyristor dual et d'autre part aux structures micro-disjoncteur nous ont permis de mettre en évidence le caractère générique de ce mode d'intégration.
2.3.2 Filières technologiq 22
2.3.3 Démonstrateurs . 23
2.4.1 Modélisation et conception optimales. 26
2.4.2 Intégration avancée 28
2.4.3 Démonstrateurs 30
2.4.4 Caractérisation. 31

3.1.1 Modèles. 33
3.1.2 Stratégie et règles de conception. 34
3.1.3 Ingénierie des systèm 34
3.1.4 Plateforme de téléingénierie coopérative . 35



Références :
Alami et al. R. ALAMI, R. CHATILA, S. FLEURY, M. GHALLAB, F. INGRAND An architecture for autonomy. Rapport LAAS N97352. International Journal of Robotic Research, Vol.17, N4, pp.315-337, Avril 1998
Alami et al. 2000 R. Alami, R. Chatila, S. Fleury, M. Herrb, F. Ingrand, M. Khatib, B. Morisset, P. Moutarlier, T. Siméon Around the Lab in 40 days ICRA, San Francisco, Avril 2000
Alami et al. R. Alami, I. Belousov, S. Fleury, M. Herrb, F. Ingrand, J. Minguez, B. Morisset, “Diligent: Towards a human-friendly navigation system”, IROS 2000
Chatila et al R. CHATILA, S. LACROIX, G. GIRALT A case study in machine intelligence: adaptive autonomous space rovers. Rapport LAAS N97463. International Conference on Field and Service Robotics (FSR'97), Canberra (Australie), 8-10 Décembre 1997, pp.101-108

Despouys et al. O. DESPOUYS, F. INGRAND, M. GHALLAB, J.-P. GOUYON Extensions
d'IXTET pour son application à la supervision d'un réseau électrique. Rapport LAAS N97279.
11ème Congrès Reconnaissance des Formes et Intelligence Artificielle (RFIA'98), Clermont-Ferrand
(France), 20-22 Janvier 1998, pp.265-274

Fleury et al. S. FLEURY, M. HERRB, R. CHATILA GenoM: a tool for the specification and
the implementation of operating modules in a distributed robot architecture. Rapport LAAS
N97244. IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS'97),
Grenoble (France), 8-12 Septembre 1997, Vol.2, pp.842-848

Fleury et al. 1998 S. FLEURY, F. DOUCHET, H. SCHINDLER Systèmes Distribués
Réactifs Embarqués : évaluation de GenoM pour la conception d'architecture logicielle de
satellites autonomes. Rapport LAAS N98117. Contrat Région Midi-Pyrénées
NRECH/9609579, Mars 1998, 15p.

Ghallab M. GHALLAB On chronicles: representation, on-line recognition and learning.
Rapport LAAS N96209. 5th International Conference on Principles of Knowledge
Representation and Reasoning (KR'96), Cambridge (USA), 5-8 Novembre 1996, pp.597-606

Ghallab 1998 M. GHALLAB Chronicles as a practical representation for dealing with time,
events and actions. Rapport LAAS N98352. Invited talk. 6th Italian Conference on Artificial
Intelligence (AIIA'98), Padoue (Italie), 23-25 Septembre 1998, pp.6-10

Gout et al J. GOUT, S. FLEURY, H. SCHINDLER A new design approach of software
architecture for an autonomous observation satellite. Rapport LAAS N99256. 5th
International Symposium on Artificial Intelligence, Robotics and Automation in Space (I.
SAIRAS'99), Noordwijk (Pays-Bas), 1-3 Juin 1999, 7p.

Ingrand et al. F. Ingrand, R. Chatila, R. Alami, F. Robert PRS: A High Level Supervision
and Control Language for Autonomous Mobile Robots In, IEEE International Conference on
Intelligent Robots and Systems ICRA'96, Minneapolois (USA), Avril 1996.

Vidal & Ghallab 1996 T. VIDAL, M. GHALLAB Dealing with uncertain durations in
temporal constraint networks dedicated to planning. Rapport LAAS N95312. 12th European
Conference on Artificial Intelligence (ECAI'96), Budapest (Hongrie), 11-16 Août 1996, 8p.

Estève et al. A. Estève, M. Djafari Rouhani, Ph. Faurous, D. Estève, " Modeling of the
silicon (100) thermal oxidation: from quantum to macroscopic formulation", Materials
Science in Semiconductor Processing 3, p. 47, (2000).

Rossi et al. C.Rossi, M.Djafari Rouhani, D.Esteve, " Prediction of the performance of a Si-micromachined
microthruster by computing the gas flow inside the thruster ", Sensor and
Actuators 87 (2000) 96-104.

Cattan et al E. Cattan, T. Haccart, G. Velu , D. Remiens, C. Bergaud, L. Nicu, «Piezoelectric
properties of PZT films for microcantilever», Sensors and Actuators 74, pp. 60-64,1999.
E Cocheteau et al E. Cocheteau, C.Bergaud, B. Belier, L. Bary, R. Plana, «Formation of
ultra-shallow p+/n junctions with BF2 implantation for the fabrication of improved
piezoresistive cantilevers», accepté, Transducers'01/Eurosensors XV, Munich, 10-14 juin

Bergaud et al C. Bergaud, L. Nicu, " Viscosity measurements based on experimental
investigations of composite cantilever beam eigenfrequencies in viscous media", Review of
Scientific Instruments, 71 (6), 2487-2791, 2000.

Tap et al H. Tap, P. Gros, A.M. Gué "An amperometric silicon-based biosensor for D-Lactate",
Sensors and Actuators B, 68/1-3 (2000) 123-127
Camon et al. H. Camon, F. Larnaudie, "Fabrication, simulation and experiment of a rotating
electrostatic silicon mirror with large angular deflection", 13th IEEE Annual International
Conference on Micro Electro Mechanical Systems (MEMS'2000), Miyazaki (Japon), 23-
27 Janvier 2000, pp.645-650

Pinel et al. S. Pinel, J. Tasselli, J.P. Bailbe, A. Marty ,E.Beyne, R.van Hoof, S. Leseduarte,
S.Marco, , O. Vendier, A. Coello Vera, “A new ultra-thin 3d integration technique:
technological and thermal investigation”, DTIP2000 Design, Test, Integration and
Packaging of MEMS/MOEMS, Paris, 9-11 May 2000.

Santana et al. A. Santana, N. Hernandez, D. Estève, "Digital Filtering: Application on the
driver's impairment detection", 2000 IEEE Intelligent Transportation Systems a Detroit
USA, octobre 1-3 2000

Soto-Romero et al G. Soto-Romero, JY. Fourniols, C. Vergnenegre, J.J. Simonne; "Uncooled
Micro-earth sensor for micro-satellite attitude control", SPIE & IEEE Aerosense 2000,
proceeding 4030 Infrared Imaging Systems pp10-20, Orlando , April 2000

Arana et al. Arana, M.Briot , G.Garcia , C.Ganibal "Un microsystèmes de perception 3D
pour robots mobiles (projet TRIDICAM) : commande des micromiroirs" Rapport LAAS
No98015. 1ères Journées du Pôle Microrobotique, Besançon (France), 13-14 Janvier 1998,

Bricout C.Bricout "Etude et faisabilité d'une microcaméra laser 3D" Doctorat, Université
Paul Sabatier, Toulouse, 30 septembre 1996

Camon et al. H.Camon , F.Larnaudie "Fabrication, simulation and experiment of a rotating
electrostatic silicon mirror with large angular deflection" 13th IEEE Annual International
Conference on Micro Electro Mechanical Systems (MEMS'2000), Miyazaki (Japon), 23-
27 Janvier 2000, pp.645-650

Ganibal et al. C.Ganibal , M.Lescure, C.Lemaire , M.Briot "A 3D vision system for robotics
application using phase shift range finder and silicon micromirrors" 2nd Topical Meeting
on Optoelectronic Distance/Displacement Measurements and Applications, Pavie (Italie),
20-22 Mai 1999, 8p.

Larnaudie F. Larnaudie "Micromiroir rotatif à actionnement électrostatique réalisé en
technologie silicium : de la conception à la réalisation Doctorat de l’Université Paul
Sabatier, 10 novembre 2000.

Paulet O.Paulet "Régulation de la position des micromiroirs d'une microcamera" 3D,
Mémoire d'ingénieur en Automatisme industriel du C.N.A.M., Toulouse, Mars 1999.

Reboul V. Reboul "Une approche de synthèse architecturale pour le développement d’une
microcaméra laser 3D", Doctorat Í.N.P.T., Toulouse, 10 Décembre 1998.

Nicu et al L. Nicu, C. Bergaud, " Experimental and Theoretical Investigations on NonLinear
Resonances of Composite Buckled Microbridges", Journal of Applied Physics, vol. 86, 10,
pp.5835-5840, 1999.

Arguel et al "Etude et réalisation d'un microcapteur de déplacement intégré", 8èmes
Journées Nationales Microélectronique Optoélectronique, 15-17 janvier 2001, Aussois.

Bonnefont et al "CLASS" : environnement convivial de modélisation et de conception des
diodes laser, 8èmes Journées Nationales Microélectronique Optoélectronique, 15-17
janvier 2001, Aussois.

Averseng et al L. Averseng, V. Bardinal, P. Dubreuil, F. Van Dijk, T. Camps et A. Muñoz-Yagüe,
JNOG‚2000, 20èmes Journées Nationales d'Optique Guidée, Toulouse, 21-22

Delléa et al Microsource laser stabilisée en fréquence, 8èmes Journées Nationales
Microélectronique Optoélectronique, 15-17 janvier 2001, Aussois.

Zitouni et al M. Zitouni, F. Morancho, H. Tranduc, P. Rossel, J. Buxo, I. Pagés, A New
Concept for the Lateral DMOS Transistor for Smart Power IC's, 11th International
Symposium on Power Semiconductor Devices and ICs (ISPSD'99), Toronto (Canada), pp.
73-76, Mai 1999.

Cézac et al. N. Cezac, P. Rossel, F. Morancho, H. Tranduc, A. Peyre-Lavigne A new generation
of power unipolar devices: the concept of the floating islands MOS transistor
(FLIMOST)”, Proc. 12th International Symposium on Power Semiconductor Devices and
ICs (ISPSD'2000), pp. 69-72,Toulouse (France), Mai 2000.

Bertrand et al G. Bertrand, C. Delage, M. Bafleur, N.Nolhier, J.M. Dorkel, Q. Nguyen, N.
Mauran, P. Perdu, Analysis and Compact Modeling of a Vertical Grounded-Base NPN
Bipolar Transistor used as an ESD Protection in a Smart Power Technology, Proc.
Bipolar/BiCMOS Circuits and Technology Meeting, pp. 28-31, Minneapolis (USA), 2000.

Roux et al. S. Roux, J-M. Dilhac, M. Bafleur, G. Charitat, A. Peyre-Lavigne, Advanced SOI
materials for high voltage integrated circuits, 5th International Seminar on Power
Semiconductors (ISPS'2000), pp.65-70, Prague (République Tchèque), Septembre 2000.

Sanchez et al, M.Breil P.Austin , J.Jalade ,H. Foch Functional integration for new power switches
design: example of the "thyristor dual" function 8th European Conference on Power Electronics
and Applications (EPE'99), Lausanne (Suisse), 7-9 Septembre 1999

Laur et al , J.L.Sanchez , P.Austin, J.Jalade , M.Marmouget , M.Breil , M.Roy , New integrated
devices for units protection: circuit-breaker structures 8th European Conference on Power
Electronics and Applications (EPE'99), Lausanne (Suisse), 7-9 Septembre 1999.

Llopis et al. O.Llopis, J.B. Juraver, B. Tamen, F. Danneville, M. Chaubet, A. Cappy, J.
Graffeuil « Nonlinear noise modeling of a PHEMT device through residual phase noise
and low frequency noise measurements », accepté au 2001 IEEE-MTT Symposium,
Phoenix,USA, Mai 2001.

Juraver et al. J.B.Juraver, O. Lllopis, T. Parra, J.C. Sarkissian, « Gain and phase noise trade-off
in microwave amplifiers and feedback oscillators », Proc. of the European Microwave
Conf., Paris, vol 3, pp. 4-7, Oct. 2000.

Regis et al. M.Regis , M.Borgarino, L.Bary, O.Llopis, J.Graffeuil, A.Gruhle, S.Kovacic,
R.Plana « SiGe bipolar technologies for low phase noise RF and microwave applications »
Conférence invitée, 2000 IEEE Radio Frequency Integrated Circuits Symposium (RFIC)
and Microwave Theory and Techniques Symposium, Boston (USA), pp.245-248, Juin 2000

Borgarino et al. M.Borgarino, L.Bary, J.Kuchenbecker, J.G.Tartarin, H.Lafontaine,
S.Kovacic, R.Plana, J.Graffeuil, F.Fantini « Hot carrier effects on the correlation resistance
in Si/SiGe heterojunction bipolar transistors », 8th IEEE International Symposium on
Electron Devices for Microwave and Optoelectronic Applications (EDMO'2000), Glasgow
(GB), 13-14 Novembre 2000, 6p.

Aubert et al. H.Aubert, P.Pons, R.Plana, J.L.Cazaux, brevet en cours de dépôt aux USA,
février 2001.

Dubuc et al. D.Dubuc, T.Parra, J.Graffeuil, « Original topology of GaAs-PHEMT mixer »,
Gallium Arsenide & Other Semiconductors Application Symposium (GAAS'2000), Paris
(France), 2-3 pp.417-420, Octobre 2000.

K. Grenier et al. K. Grenier, D. Dubuc, P.Pons, R.Plana, L.Rabbia, T.Parra, J.Graffeuil,
« Silicon MEM technology for millimeter-wave applications », Proc. Microelectronic and
MEMS Technologies, Edinburgh, UK, May-June 2001.

Bary et al. L.Bary, M.Borgarino, R.Plana, T.Parra, S.Kovacic, H.Lafontaine, J.Graffeuil,
« Transimpedance amplifier based full low frequency noise characterization set-up for
Si/SiGe HBT's », accepté pour parution dans IEEE Transaction on Electron Devices, Avril 2001.

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