IEE Books

Properties of crystalline silicon

Edited by Robert Hull, University of Virginia, USA

ABBREVIATIONS

A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Z |

A

AAS	atomic absorption spectroscopy
AB	antibonding
AC	alternating current
AFM	atomic force microscopy
AM	Austin model
APCVD	atmospheric pressure chemical vapour deposition
APD	antiphase defect
APD	antiphase domain (boundary)
APW	augmented plane wave
ARPES	angle resolved photoemission spectroscopy
ASED	atom superposition and electron delocalisation

Abbreviations Index

B

BC	bond centred
BCA	binary collision approximation
BDT	brittle-to-ductile transition
BESOI	bond and etchback silicon-on-insulator
BHS	Bachelet-Hamann-Schlueter
BOX	buried oxide
BP	Becke-Perdew
BPS	Burton Prim Slichter
BSD	backside damage
BSF	back surface field
BSOI	bonded silicon-on-insulator
BTE	Boltzmann transport
BZ	Brillouin zone

Abbreviations Index

C

CB	conduction band
CCD	charge coupled device
CCM	cyclic cluster model
CI	configuration interaction
CITS	current-imaging-tunnelling spectroscopy
CMOS	complementary metal oxide semiconductor
CMP	chemical mechanical polishing
CNDO	complete neglect of differential overlap
CNDO/S	CNDO/spectroscopic
COP	crystal originated particle
COS	corona oxide semiconductor
CPAA	charged particle activation analysis
CPMD	Car-Parrinello molecular dynamics
CPU	central processing unit
C-V	capacitance-voltage
CVD	chemical vapour deposition
CW	continuous wave
CZ	Czochralski
Cz	Czochralski
CZN	cerium zinc nitrate

Abbreviations Index

D

DAS	dimer adatom stacking fault
DC	direct current
DE-AAS	drop etching atomic absorption spectroscopy
DFT	density functional theory
DF-TB	density functional based tight binding
DHL	dislocation half-loop
DI	de-ionised
2DLFM	two-dimensional low-frequency motion
DLTS	deep level transient spectroscopy
DMC	diffusion Monte Carlo
2DNG	two-dimensional nucleation and growth
DO	differential overlap
DQMC	diffusion quantum Monte Carlo
DRAM	dynamic random access memory
DRIE	deep reactive ion etching
DSPE	double solid phase epitaxy
DZ	denuded zone

Abbreviations Index

E

EBIC	electron-beam-induced current
ECR	electron cyclotron resonance
EELS	electron energy loss spectroscopy
ELID	electrolytic in-process dressing
ELTRAN R^TM	epitaxial layer transfer
EMA	effective mass approximation
EMT	effective mass theory
ENDOR	electron nuclear double resonance
EOR	end of range
EPM	empirical pseudopotential model
EPR	electron paramagnetic resonance
ESF	extrinsic stacking fault
ESR	electron spin resonance
ETB	empirical tight binding

Abbreviations Index

F

FCC	face centred cubic
FD	fully-depleted
FEOL	front end of line
FET	field effect transistor
FFT	fast Fourier transform
FPD	flow pattern defect
FRS	forward recoil scattering
FTIR	Fourier transform infrared
FWHM	full width at half maximum
FWHP	full width at half peak
FZ	floating zone

Abbreviations Index

G

GEA	gradient expansion approximation
GFA	gas fusion analysis
GGA	generalised gradient approximation
GOI	gate oxide integrity
GSMBE	gas-source molecular beam epitaxy
GTO	Gaussian-type orbital
GW	approximation to the self energy based on the one-electron Green's function G and screened Coulomb interaction W (Hedlin & Lundquist, 1969)

Abbreviations Index

H

HBT	heterojunction bipolar transistor
HC	high carbon (content)
HEMT	high electron mobility transistor
HF	Hartree-Fock
HFR	Hartree-Fock-Roothaan
HL	high level
HNA	hydrofluoric-nitric-acetic
HREELS	high resolution electron energy loss spectroscopy
HREM	high resolution electron microscopy
HRTEM	high resolution transmission electron microscopy
HSC	Hamann-Schlueter-Chiang
HTEM	high resolution transmission electron microscopy
HTS	high temperature sputtering
HTS	high temperature superconducting

Abbreviations Index

I

I	self-interstitial
IBAS	ion beam assisted sputtering
IBZ	irreducible Brillouin zone
IC	integrated circuit
IIP3	input-referred third order intercept point
INDO	intermediate neglect of differential overlap
IPA	isopropyl alcohol
IR	infrared
IRAS	infrared absorption spectroscopy
ISF	intrinsic stacking fault
ITOX	internal thermal oxide/oxidation
I-V	current-voltage

Abbreviations Index

J

JFET	junction field effect transistor

Abbreviations Index

K

KB	Kleinman-Bylander
K-K	Kramers-Kronig
kMC	kinetic Monte Carlo
KS	Kohn-Sham

Abbreviations Index

L

L	longitudinal
LA	longitudinal acoustic
LATID	large-angle-tilt implanted drain
LBIC	laser beam induced current
LC	low carbon (content)
LCAO	linear combination of atomic orbitals
LCGO	linear combination of Gaussian orbitals
LD	low dose
LDA	local density approximation
LDA-PP	local density approximation using pseudopotentials
LDD	lightly doped drain
LDF	local density functional
LED	light emitting diode
LEED	low energy electron diffraction
LEEM	low energy electron microscopy
LET	linear energy transfer
LHeT	liquid helium temperature
LL	low level
LMTO	linear muffin tin orbital
LNA	low noise amplifier
LO	local oscillator
LO	longitudinal optical
LPCVD	low pressure chemical vapour deposition
LPVPE	low pressure vapour phase epitaxy
LRP	limited reaction processing
LSD	local spin density
LSDA	local spin density approximation
LSI	large scale integration
LST	light scattering tomography
LTO	low temperature oxide
LVM	local vibrational mode

Abbreviations Index

M

MBA	molecular beam allotaxy
MBE	molecular beam epitaxy
MC	Monte Carlo
MCM	molecular cluster model
MCZ	magnetic field-applied Czochralski
MD	molecular dynamics
MEMS	micro electromechanical systems
MESFET	metal-semiconductor field effect transistor
MFD	multiple stacking fault defect
MIM	metal insulator metal
MINDO	modified INDO
MIR	multiple internal reflection
MIT	multiple internal transmission
MIT-IR	multiple internal transmission infrared
ML	monolayer
MLDA	modified local density approximation
MNDO	modified NDDO
MODFET	modulation doped field effect transistor
MOS	metal oxide semiconductor
MOSFET	metal oxide semiconductor field effect transistor
MP	Monkhorst and Pack
M-S	metal-semiconductor
MS	molecular statics
MSPE	monolayer solid phase epitaxy

Abbreviations Index

N

NAA	neutron activation analysis
ND	new thermal donor
NDDO	neglect of diatomic differential overlap
NDM	negative differential mobility
NDO	neglect of differential overlap
NF	noise figure
NFET	n channel field effect transistor
NI	not indicated
NMOS	n channel metal oxide semiconductor
NMOSFET	n channel
MOSFET NN	nearest neighbour
NNN	next nearest neighbour

Abbreviations Index

O

ODE	orientation-dependent etch
ODMR	optically detected magnetic resonance
OED	oxidation enhanced diffusion
OIP3	output-referred third order intercept point
OISF	oxidation induced stacking fault
OME	oxide mediated epitaxy
OPW	orthogonalised plane wave
OSF	oxidation induced stacking fault
OV	oxygen-vacancy (centre)

Abbreviations Index

P

PACE	plasma assisted chemical etching
PBS	poly-backside seal
PC	photoconductivity
PCD	photoconductivity decay
PDG	phosphorus diffusion gettering
PID	planar interstitial defect
PIMC	path integral Monte Carlo
PL	photoluminescence
PLE	photoluminescence excitation
PM	parametrised model
PMOS	p channel metal oxide semiconductor
PP	pseudopotential
PPPW	pseudopotential plane-wave
PR	piezoresistive
PRDDO	partial retention of diatomic differential overlap
PSG	phosphosilicate glass
PTIS	photothermal ionisation spectroscopy
PV	photovoltaic
PW	Perdew-Wang
PZ	Perdew-Zunger

Abbreviations Index

Q

QP	quasiparticle

Abbreviations Index

R

RBE	reactive beam epitaxy
RBS	Rutherford backscattering
RE	rare earth
RF	radio frequency
RGA	residual gas analysis
RHEED	reflection high-energy electron diffraction
RIE	reactive ion etching
RMS	root mean square
RPCVD	reduced pressure chemical vapour deposition
RSCE	reverse short-channel effects
RT	room temperature
RTA	rapid thermal anneal
RTCVD	rapid thermal chemical vapour deposition
RTP	rapid thermal processing
RW	Rayleigh wave

Abbreviations Index

S

SAD	selected area diffraction
SADS	silicide as the doping source
SANS	small angle neutron scattering
SB	Schottky barrier
SBH	Schottky barrier height
SBZ	surface Brillouin zone
SCF	self-consistent field
SCI	surface charge imaging
SCP	surface charge profiling
SDL	stable defect layer
SE	spectroscopic ellipsometry
SEM	scanning electron microscopy
SETB	semi-empirical tight-binding
SEU	single event upset
SF	stacking fault
SFT	stacking fault tetrahedra
SGS	SiGe on sapphire
SIMOX	separation by implantation of oxygen
SIMS	secondary ion mass spectrometry
SOI	silicon-on-insulator
SOS	silicon-on-sapphire
SPE	solid phase epitaxy
SPER	solid phase epitaxial regrowth
SPV	surface photovoltage
SQUID	superconducting quantum interference device
SR	spreading resistance
SRAM	static random access memory
SRH	Shockley-Read-Hall
SRP	spreading resistance profile
STD	shallow thermal donor
STIR	site total indicator reading
STM	scanning tunnelling microscopy
STO	Slater-type orbital
SX-LDA	screened-exchange local density approximation

Abbreviations Index

T

T	tetrahedral
T	transverse
TA	transverse acoustical
TB	tight binding
TBMD	tight binding molecular dynamics
TBTE	tight-binding total-energy
TCAD	technology computer aided design
TCP	temperature coefficient of piezoresistance
TCR	temperature coefficient of resistance
TD	thermal donor
TD	threading dislocation
TDD	thermal double donor
TED	transient enhanced diffusion
TEM	transmission electron microscopy
TFSOS	thin film silicon on sapphire
TIME	Ti interlayer mediated epitaxy
TO	transverse optical
TR	transmit/receive
TTV	total thickness variation
TXRF	total reflectance X-ray fluorescence

Abbreviations Index

U

UHV	ultra high vacuum
UHV/CVD	ultra high vacuum chemical vapour deposition
ULSI	ultra large scale integration
USTD	ultra-shallow thermal donor
UV	ultraviolet

Abbreviations Index

V

V	vacancy
VFF	valence force field
VLPCVD	very low pressure chemical vapour deposition
VLSI	very large scale integration
VMC	variational Monte Carlo
VO	vacancy-oxygen
VPD-AAS	vapour phase decomposition atomic absorption spectroscopy
VPE	vapour phase epitaxy
VWN	Vosko-Wilk-Nusair

Abbreviations Index

W

WLF	Wannier-like function

Abbreviations Index

X

XPS	X-ray photoelectron spectroscopy
XRD	X-ray diffraction
XROI	X-ray and optical interferometry
XTEM	cross-sectional transmission electron microscopy

Abbreviations Index

Z

ZDO	zero differential overlap

Abbreviations Index